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Cited article:

Self-consistent kinetic model of low-pressure - flowing discharges: II. Surface processes and densities of N, H, species

B Gordiets, C M Ferreira, M J Pinheiro and A Ricard
Plasma Sources Science and Technology 7 (3) 379 (1998)
https://doi.org/10.1088/0963-0252/7/3/016