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Network hydration, ordering and composition interplay of chemical vapor deposited amorphous silica films from tetraethyl orthosilicate
Babacar Diallo, Konstantina C. Topka, Maxime Puyo, Charlotte Lebesgue, Cécile Genevois, Raphael Laloo, Diane Samelor, Hélène Lecoq, Mathieu Allix, Hugues Vergnes, François Senocq, Pierre Florian, Vincent Sarou-Kanian, Thierry Sauvage, Marie-Joelle Menu, Brigitte Caussat, Viviane Turq, Constantin Vahlas and Nadia Pellerin Journal of Materials Research and Technology 13 534 (2021) https://doi.org/10.1016/j.jmrt.2021.04.067