| Issue |
J. Chim. Phys.
Volume 85, 1988
|
|
|---|---|---|
| Page(s) | 1015 - 1025 | |
| DOI | https://doi.org/10.1051/jcp/1988851015 | |
| Published online | 29 May 2017 | |
In-situ diagnostic techniques for ultrathin organic films
1 Department of Chemical Engineering, California.
2 Department of Electrical Engineering and Computer Science, California.
3 Department of Physics, University of California at Davis, Davis, California 95616, California.
Before the Langmuir-Blodgett (L-B) technique can be exploited as a reliable method for fabricating ultra-thin organic films for engineering devices, it will be necessary to develop in-situ techniques to monitor and control the deposition process. In this paper we review criteria for in-situ techniques and discuss promising methods which can be applied to in-situ measurement. The development of in-situ techniques should proceed along with studies of the fabricated films and must come from an understanding of the relationships among process parameters and the physical properties of the completed films.
Résumé
Avant de pouvoir exploiter la méthode Langmuir-Blodgett (L-B) comme technique fiable de fabrication des films très minces, il est nécessaire de développer la capacité de vérifier et de contrôler la déposition. Dans cette étude, nous passons en revue les techniques « in-situ » dont l'utilité parait prometteuse. Il est raisonnable que le développement de telles techniques « in-situ » suive la compréhension des relations entre les caractéristiques de la déposition et les caractéristiques physiques des films finis.
© Elsevier, Paris, 1988